Genome Technology Center

CMOS-based Resonant Cantilever Systems for Chemical and Biological Sensing Applications

Cyril Vancura
Physical Electronics Laboratory, ETH Zurich, Switzerland

The topic of the talk is the design, the characterization and the application of integrated CMOS resonant microcantilever sensors as chemical and biological sensors. In the dynamic operation mode, the cantilevers are driven at their fundamental resonance frequency. An increase of the cantilever mass leads to a decrease of the resonance frequency. Hence, the resonant cantilever essentially acts as a microbalance with a resolution in the picogram range. The cantilever sensor systems studied in this work are fabricated using an industrial CMOS process combined with CMOS-compatible postprocess micromachining. By coating the cantilever with a chemically or biologically sensitive layer, such a mass-sensitive cantilever can be turned into a chemical or biological sensor. The feasibility of the system is proven by demonstrating the detction of volatile organic compounds in water and prostate specific antigen (PSA) in a sample fluid.

Liquid-Phase Chemical and Biochemical Detection Using Fully Integrated Magnetically Actuated Complementary Metal Oxide Semiconductor Resonant Cantilever Sensor Systems.
Cyril Vanura, Yue Li, Jan Lichtenberg, Kay-Uwe Kirstein, Andreas Hierlemann, and Fabien Josse.
Anal. Chem.; 2007; 79(4) pp 1646 - 1654; (Article) DOI: 10.1021/ac061795g

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