Community Academic Profiles–

Gregory Kovacs

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Publication Details

  • PECVD Silicon Carbide as a Chemically Resistant Material for Micromachined Transducers

    Flannery, A. F., Mourlas, N. J., Storment, C. W., Tsai, S., Tan, S. H., Heck, J., Monk, D., Gogoi, B., Kovacs, G. T. A.. Sensors and Actuators A. 1998; 70 (1 - 2): 48 - 55

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